Number of hours
- Lectures 18.0
- Projects -
- Tutorials 2.0
- Internship -
- Laboratory works -
- Written tests 2.0
ECTS
ECTS 0.5
Goal(s)
With this lecture cold plasmas used in industry will be presented from definition to application: material processing, surface cleaning, light emission, medical...
Content(s)
1. Cold plasma definitions
2. Cold plasma discharges and ignition
3. Deposition
4. Etching
5. Other applications like medical or light emission
Basics in electrostatics, wave propagation, solid physics and statistical physics
EXAM
The course exists in the following branches:
- Curriculum - MAT - Semester 9
Course ID : KAMA9M03
Course language(s):
You can find this course among all other courses.
Bibliographie de référence :
Cold Plasmas in Materials Fabrication, Alfred Grill, IEE Press (1993), Principles of plasma discharges and materials processing, M. A. , Lieberman and A. J. Lichtenberg, John Wiley&Sons, Inc. (1994), Industrial
plasma engineering, J. Reece Roth, IOP Publishing (1995)